Novel Abrasive-Free Slicing Method for Si Using Wet Chemical Etching
نویسندگان
چکیده
منابع مشابه
Wet-Chemical Etching and Cleaning of Silicon
A Introduction Research and manufacturing related to silicon devices, circuits, and systems often relies on the wet-chemical etching of silicon wafers. The dissolution of silicon using liquid solutions is needed for deep etching and micromachining, shaping, and cleaning. Also, wet-chemistries are often used for defect delineation in single crystal silicon materials. In this paper, a review of t...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2017
ISSN: 0912-0289,1882-675X
DOI: 10.2493/jjspe.83.837